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  1. plasma source - e-beam evaporator - atomic hydrogen source - sputter gun - vacuum - thin films - electron beam evaporator - UHV - MBE - from tectra GmbH ...

    plasma source - e-beam evaporator - atomic hydrogen source - sputter gun - vacuum - thin films - electron beam evaporator - UHV - MBE - from tectra GmbH ...
    Mini-Coater0

    www.tectra-gmbh.com - 2009-02-13

specs2 electron optics1 plasma source1 ion optics1 design7 cathode1 spec2 ion gun1 leed2 custom5 green4 green building2 thin film growth1 specifications2

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